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originally published in 1991
SEMI D67 — Test Methods for Antifouling Property and Chemical Resistance of FPD Polarizing Films and its Materials
Test methods have been shown to give statistically valid results
6-93 (technical revision)
It assumes the existence of terminology described in other SEMI Flat Panel Display Documents
C09600 - SEMI C96 - Test Method for Determining Density of Chemical Mechanical Planarization (CMP) Slurries StdTpc-FPD Color Filters originally published in 1991The purpose of this Test Method is to provide a standardized test method for measuring the density of slurries, defining the sample temperature for the density measurement and specifying the number of significant figures to which the resulting measurement should be measured by the user and reported in the corresponding Certificate of Analysis (CoA) from the supplier. This Test Method describes the conditions and procedures for measuring the density of
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